Circuit board and production of the same

ABSTRACT

A circuit board is configured so as to include not less than two wiring layers, an insulator layer for electric insulation between the wiring layers, and an inner-via-hole conductive member provided in the insulator layer in a thickness direction of the insulator layer, for electric connection between the wiring layers. The insulator layer is made of a composite material containing an organic resin and a material having a smaller thermal expansion coefficient than that of the organic resin, and includes a surface part, a core part, and a surface part laminated in the stated order, the surface part having a high content of the organic resin, the core part having a low content of the organic resin. The wiring layers have a land portion that is connected with the inner-via-hole conductive member, the land portion being embedded so as to be substantially in contact with the core part, and the inner-via-hole conductive member has a thickness substantially equal to a thickness of the core part. According to this configuration, a part of the metal foil is embedded in the insulator layer so as to be in contact with the core layer. Therefore, this makes it possible to provide a circuit board in which portions of the conductive material can be selectively compressed, and which hence is capable of ensuring stable connection between layers.

FIELD OF THE INVENTION

[0001] The present invention relates to a circuit board excelling inconnection reliability and wiring-pattern adhesive strength, and to amethod for producing the same.

BACKGROUND OF THE INVENTION

[0002] Recently, following the tendency of electronic devices towardcompact size, less weight, improved function, and improved performance,it is increasingly demanded, not only in industrial equipment fields butalso widely in consumer equipment fields, to supply inexpensivemulti-layer circuit boards on which semiconductor chips such as LSIs canbe mounted at a high density.

[0003] In response to the demand of the market, a technology has beendeveloped whereby, in place of a conventional ceramic multi-layer board,a resin multi-layer circuit board available at a lower price is renderedsuitable for high-density mounting.

[0004] A circuit board of “ALIVH” (a trademark of Mastushita ElectricIndustrial Co., Ltd.) structure, that is, a circuit board having aninner via hole structure for all layers, for instance, has been proposedas the above circuit board (JP6(1994)-268345A). This circuit board canbe supplied at a relatively low price since it is a resin multi-layerboard in which insulator layers are made of a composite material of anon-woven aramid fabric reinforcer and an epoxy resin. It is alsosuitable for high-density mounting since the inner-via-hole connectiontechnique permits arbitrary portions of wiring layers to be connectedvia a conductive paste, that is, the “ALIVH” structure is applied.

[0005] In such a circuit board, it is important to secure thereliability of the inner-via-hole connection, but the reliability ofinner-via-hole connection has had problems as described below.

[0006] Specifically, inner-via-hole connectors are made of a differentcomponent material from that of an insulator layer, thereby havingdifferent physical properties (thermal expansion coefficient, humidityexpansion coefficient, etc.) from those of the insulator layer.Therefore, because of the mismatch between an organic resin material forthe insulator layer that has a relatively great thermal expansioncoefficient and an inner-via-hole connector material containing a metalwith a relatively small thermal expansion coefficient as a maincomponent, there particularly has been a drawback in that stress in athickness direction occurs inside the inner-via-hole connector materialdue to a heat cycle. When an excessive stress is applied, IHV connectorsare damaged, thereby causing the connection reliability to deteriorate.

[0007] A technique that seems to be applicable for solving this -problemis a technique of decreasing the difference between the physicalproperties of materials forming the insulator layer and theinner-via-hole connectors so as to prevent the damage to the IHVconnectors. To be more specific, by adding an inorganic filler such assilica to a resin of the insulator layer so as to decrease the contentof the resin in the insulator layer, the thermal expansion coefficientof the insulator layer is decreased.

[0008] The resin of the insulator layer, however, functions for firmlybonding the wiring layer to the insulator layer. In the case where theinsulator layer includes a decreased content of the resin in surfacepart, it loses its adhesive strength, and problems arise such asexfoliation of the wiring layer, exfoliation of components mounted on acomponent-mount surface together with pads, etc. Thus, theaforementioned technique does not suffice.

SUMMARY OF THE INVENTION

[0009] The present invention has been made to solve the aforementionedproblems in the prior art, and it is an object of the present inventionto provide a circuit board that exhibits sufficient bond strengthbetween the wiring layer and the insulator layer and that providesexcellent inner-via-hole connection reliability, as well as to provide amethod for producing the circuit board.

[0010] To achieve the above object, a circuit board of the presentinvention includes:

[0011] not less than two wiring layers,

[0012] an insulator layer for electric insulation between the wiringlayers; and

[0013] an inner-via-hole conductive member provided in the insulatorlayer in a thickness direction of the insulator layer for electricconnection between the wiring layers,

[0014] wherein:

[0015] the insulator layer is made of a composite material containing anorganic resin and a material having a smaller thermal expansioncoefficient than that of the organic resin, and includes a surface part,a core part, and a surface part laminated in the stated order, thesurface part having a relatively high content of the organic resin, thecore part having a relatively low content of the organic resin;

[0016] the wiring layers have a land portion that is connected with theinner-via-hole conductive member, the land portion being embedded so asto be substantially in contact with the core part; and

[0017] the inner-via-hole conductive member has a thicknesssubstantially equal to a thickness of the core part.

[0018] A first circuit board production method of the present inventionis a method for producing a circuit board that includes not less thantwo wiring layers, an insulator layer for electric insulation betweenthe wiring layers, and an inner-via-hole conductive member provided inthe insulator layer in a thickness direction of the insulator layer forelectric connection between the wiring layers, and

[0019] the circuit board producing method comprises the steps of:

[0020] making an insulator layer of a composite material containing anorganic resin and a material having a smaller thermal expansioncoefficient than that of the organic resin so that the insulator layerincludes a surface part, a core part, and a surface part laminated inthe stated order, the surface part having a relatively high content ofthe organic resin, the core part having a relatively low content of theorganic resin;

[0021] opening an inner via hole in the insulator layer in a thicknessdirection of the insulator layer, and filling the inner via hole with aconductive material;

[0022] providing metal foils on both sides of the insulator layer, eachmetal foil having a protruded portion at a predetermined position sothat the position coincides with a position of the inner via hole filledwith the conductive material;

[0023] applying heat and pressure to external sides of the metal foilsby hot pressing so that the protruded portions of the metal foils comesubstantially in contact with the core part of the insulator layer, tocause the inner via hole filled with the conductive material to form aninner-via-hole conductive member with a thickness substantially equal toa thickness of the core part; and

[0024] etching the metal foils so as to leave the protruded portion asthe land portion.

[0025] A second circuit board producing method of the present inventionis a method for producing a circuit board including not less than twowiring layers, an insulator layer for electric insulation between thewiring layers, and an inner-via-hole conductive member provided in theinsulator layer in a thickness direction of the insulator layer, forelectric connection between the wiring layers, and

[0026] the circuit board producing method comprises the steps of:

[0027] making an insulator layer of a composite material containing anorganic resin and a material having a smaller thermal expansioncoefficient than that of the organic resin so that the insulator layerincludes a surface part, a core part, and a surface part laminated inthe stated order, the surface part having a relatively high content ofthe organic resin, the core part having a relatively low content of theorganic resin;

[0028] opening an inner via hole in the insulator layer in a thicknessdirection of the insulator layer, and filling the inner via hole with aconductive material;

[0029] providing transfer bases on both sides of the insulator layer,each of the transfer bases having a metal foil patterned in apredetermined pattern so as to coincide with a position of the inner viahole filled with the conductive material; and

[0030] applying heat and pressure to external sides of the transferbases by hot pressing so that the metal foils come substantially incontact with the core part of the insulator layer, to cause the innervia hole filled with the conductive material to form an inner-via-holeconductive member with a thickness substantially equal to a thickness ofthe core part.

[0031] In the above, “the inner-via-hole conductive member has athickness substantially equal to a thickness of the core part” meansthat the thickness of the inner-via-hole conductive member is equal tothe thickness of the core part, or not-more-than-10% greater than thethickness of the core part, or not-more-than-5-μm greater than thethickness of the core part.

[0032] According to the present invention, the wiring layers are held byan organic resin excelling in adhesiveness, while mismatch hardly occursbetween the thermal expansion coefficients. Therefore, it is possible toprovide a circuit board that exhibits sufficient bond strength betweenthe wiring layer and the insulator layer, and that provides excellentinner-via-hole connection reliability, as well as to provide a methodfor producing the circuit board. Furthermore, since a part of the metalfoil is embedded in the insulator layer so as to be in contact with thecore layer thereof, portions of the conductive material can beselectively compressed, and hence this makes it possible to provide acircuit board capable of ensuring stable connection between layers.

BRIEF DESCRIPTION OF THE DRAWINGS

[0033]FIG. 1 is a cross-sectional view schematically illustrating acircuit board according to an embodiment of the present invention.

[0034]FIG. 2 is a cross-sectional view schematically illustrating acircuit board according to a first embodiment of the present invention.

[0035]FIGS. 3A to 3E are cross-sectional views illustrating a process ofproducing the circuit board according to the first embodiment of thepresent invention.

[0036]FIG. 4 is a cross-sectional view schematically illustrating acircuit board according to a second embodiment of the present invention.

[0037]FIG. 5 is a cross-sectional view schematically illustrating acircuit board according to a third embodiment of the present invention.

[0038]FIG. 6 is a cross-sectional view schematically illustrating acircuit board according to a fourth embodiment of the present invention.

[0039]FIG. 7 is a cross-sectional view schematically illustrating acircuit board according to a fifth embodiment of the present invention.

[0040]FIG. 8 is a cross-sectional view schematically illustrating acircuit board of a comparative example.

[0041]FIGS. 9A to 9E are cross-sectional views schematicallyillustrating a process of producing a circuit board according to a sixthembodiment of the present invention.

[0042]FIGS. 10A to 10E are cross-sectional views schematicallyillustrating a process of producing a double-sided circuit boardaccording to a seventh embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

[0043] In the configuration of the circuit board of the presentinvention, the material having a thermal expansion coefficient smallerthan that of the organic resin preferably is a fabric of an inorganicfiber. According to this preferable example, it is possible to provide acircuit board that not only has the sufficient bond strength and theexcellent inner-via-hole connection reliability, but also excels inrigidity and mechanical strength of the whole circuit board at a lowercost. Further, in this case, the foregoing nonwoven fabric preferably isa glass nonwoven fabric.

[0044] Furthermore, in the configuration of the circuit board of thepresent invention, the material having a thermal expansion coefficientsmaller than that of the organic resin preferably is a nonwoven fabricof an inorganic fiber. According to this preferable example, it ispossible to provide a circuit board that not only has the sufficientbond strength and the excellent inner-via-hole connection reliability,but also excels in mechanical strength at a lower cost. Further, in thiscase, the foregoing nonwoven fabric preferably is a glass nonwovenfabric.

[0045] Furthermore, in the configuration of the circuit board of thepresent invention, the material having a thermal expansion coefficientsmaller than that of the organic resin preferably is an organic film.According to this preferable example, it is possible readily to obtainan insulator layer with a uniform thickness, in addition to thesufficient bond strength and the excellent inner-via-hole connectionreliability, and it is possible to provide a circuit board whoseimpedance is controlled readily. In this case, the organic filmpreferably is an organic film made of at least one selected from thegroup consisting of polyimide, benzocyclobutene (BCB),polytetrafluoroethylene (PTFE), aramid, polyparaphenylenebenzobisoxazole (PBO), and all aromatic polyesters.

[0046] In the configuration of the circuit board of the presentinvention, the material having a thermal expansion coefficient smallerthan that of the organic resin preferably is an inorganic filler.According to this preferable example, it is possible readily to providea circuit board to which, in addition to the sufficient bond strengthand the excellent inner-via-hole connection reliability, properties suchas heat conductivity are given by selecting the type of the inorganicfiller and the composition ratio. Furthermore, in this case, theinorganic filler preferably is at least one inorganic filler selectedfrom the group consisting of aluminum hydroxide, aluminum oxide(alumina), silicon dioxide (silica), and silicon nitride.

[0047] Furthermore, in the configuration of the circuit board of thepresent invention, the material having a thermal expansion coefficientsmaller than that of the organic resin preferably is made of a porousmaterial. According to this preferable example, it is possible toprovide a circuit board that has improved rigidity and increasedmechanical strength as to the whole circuit board, in addition to thesufficient bond strength and the excellent inner-via-hole connectionreliability. Furthermore, in this case, the porous material made of theorganic resin preferably is impregnated with a composition of aninorganic filler and an organic resin, so as to form the core part. Inthis case, furthermore, the porous material preferably is made of afluororesin, and the inorganic filler preferably is at least oneinorganic filler selected from the group consisting of aluminumhydroxide, aluminum oxide (alumina), silicon dioxide (silica), andsilicon nitride. The fluororesins are suitable for high-frequencycircuits since they have a low dielectric constant.

[0048] Furthermore, in the configuration of the circuit board of thepresent invention, the foregoing organic resin preferably is at leastone organic resin selected from the group consisting of epoxy resins,polyimide resins, cyanate ester resins, phenol resol resins, allaromatic polyester resins, polyphenylene ether (PPE) resins,bismaleimide triazine resins, and fluororesins. In this case, theorganic resin preferably is impregnated with at least one inorganicfiller selected from the group consisting of aluminum hydroxide,aluminum oxide (alumina), silicon dioxide (silica), and silicon nitride.

[0049] Furthermore, in the configuration of the circuit board of thepresent invention, the inner-via-hole conductive material preferably ismade of a composite material of a conductive filler and an organicresin. In this case, the conductive filler preferably is made of atleast one selected from the group consisting of gold, silver, copper,nickel, palladium, lead, tin, indium, and bismuth, alloys of these, andmixtures of these.

[0050] The following description will explain the present invention inmore detail referring to the following embodiment.

[0051]FIG. 1 is a cross-sectional view schematically illustrating acircuit board (double-sided circuit board) of the present invention. Asshown in FIG. 1, a circuit board of the present invention includes aninsulator layer 101, inner-via-hole connectors 102 formed in theinsulator layer 101 and made mainly of a metal, and lands 103 embeddedin the insulator layer 101. Here, the insulator layer 101 is composed ofsurface parts 105 made of an organic resin and a core part 106, andsurfaces 104 of the lands 103 in contact with the inner-via-holeconnectors 102 are substantially in the same plane that includesinterfaces between the surface parts 105 and the core part 106. Further,each inner-via-hole connector 102 has substantially the same thicknessof the core part 106. The core part 106 preferably has a thickness in arange of 5 μm to 200 μm. Furthermore, a resin content in the foregoingcore part preferably is in a range of 0 percent by weight (wt %) to 50wt %.

[0052] The surface parts 105 of the insulator layer 101 are made of anorganic resin layer, and serve to retain and fix the lands 103. Theorganic resin layer has a thickness in a range of 2 μm to 50 μm. Itshould be noted that the organic resin may be used for forming thesurface parts of the circuit board of the present invention as long asit exhibits a sufficient adhesive strength, even in the case where aninorganic filler is dispersed therein or a material of the core part 106with a small thermal expansion coefficient is mixed therein.

[0053] In FIG. 1, a through hole filled with the inner-via-holeconnector material (conductive member) 102 is in a tapered shape, havinga wider upper part as viewed in the cross-sectional view, and aconductive paste is put therein from the upper side. It is easier tofill the conductive paste therein from the wide opening on the upperside. In the case where, for instance, the core part 106 is aresin-impregnated glass cloth, the through hole having the wider openingon the upper side as shown in FIG. 1 may be formed by one to three shotsof a carbon dioxide gas laser with a wavelength of 9.4 μm to 10.6 μm.

[0054] The following description will depict organic materials that canbe used in the circuit board of the present invention, and materials forthe wiring layer and the inner-via-hole connectors.

[0055] (a) Organic Resin

[0056] Examples adaptable as the organic resin in the present inventioninclude thermoplastic or thermosetting organic resins such as epoxyresins, polyimide resins, cyanate ester resins, phenol resol resins, allaromatic polyester resins, polyphenylene ether (PPE) resins,bismaleimide triazine resins, and fluororesins. Furthermore, any one ofthe foregoing organic resins further containing inorganic fillers suchas aluminum hydroxide, aluminum oxide (alumina), silicon dioxide(silica), and silicon nitride may be used. In the case where a resincomposition containing an inorganic filler is used, a content of theinorganic filler preferably is not more than 70 percent by volume (vol%). When the inorganic filler exceeds 70 vol %, a content of the organicresin in the resin composition is insufficient for retaining the wiringlayer, and an adhesive strength exerted between the wiring layer and theresin composition decreases greatly.

[0057] (b) Composition of Inner-Via-Hole Connector Material

[0058] Inner-via-hole connectors of the present invention can be made ofa conductive resin composition containing a conductive filler.

[0059] The conductive filler may be made of at least one metal selectedfrom gold, silver, copper, nickel, palladium, lead, tin, indium, andbismuth, or an alloy or a mixture of any of these metals. Furthermore,also useful are coated fillers that are composed of balls made of theaforementioned metals, alloys, oxides such as alumina or silica, ororganic synthetic resins, and are coated with the aforementioned metalsand alloys.

[0060] The shape is not limited in particular, and for example, powderyfillers, fiber-form fillers, powdery granulated fillers,spherical-ball-like fillers, and mixtures of any of these can be used.

[0061] Examples of the resin used as a binder for the resin compositioninclude fluid epoxy resins, polyimide resins, cyanate ester resins, andphenol resol resins. Examples of the epoxy resins include glycidyl etherepoxy resins such as bisphenol A epoxy resin, bisphenol F epoxy resin,and bisphenol AD epoxy resin, and epoxy resins each having two or moreepoxy groups such as alicyclic epoxy resin, glycidyl amine epoxy resin,and glycidyl ester epoxy resin.

[0062] The material may contain additives such as solvents ordispersants, for instance, butyl cellosolve, ethyl cellosolve, butylcarbitol, ethyl carbitol, butyl carbitol acetate, ethyl carbitolacetate, α-terpineol, etc., as required.

[0063] The material for the inner-via-hole connectors is not limited toa conductive composition. The inner-via-hole connectors of the circuitboard of the present invention may be metallic via posts formed by a wetprocess like plating or a vapor process such as sputtering vapordeposition, or may be formed by filling metallic balls.

[0064] (c) Wiring Layers

[0065] Metal foils such as copper foils may be used for forming thewiring layers of the circuit board of the present invention. Thethickness of the same is not limited as long as the copper foil has athickness greater than that of the surface part 105 of the insulatorlayer 101, and hence, those with a thickness of 3 μm to 35 μm that areused in ordinary circuit boards are suitable. It should be acknowledgedthat thicker metal foils than those may be used also. The metal foilpreferably is embedded in the electric insulator layer to a depth of 5%to 50% of the thickness of the metal foil.

[0066] A metal foil formed on a supporting substrate (carrier), that is,a so-called carrier-borne metal foil, may be used as the above metalfoil. A typical carrier-borne metal foil is a copper foil laminated onan aluminum carrier with a parting layer interposed therebetween, whichis available commercially. In the case where this is adapted in anembodiment of the present invention, the copper foil is patternedbeforehand by etching with, for instance, an aqueous solution of ironchloride or an aqueous solution of ammonium persulfate, and the wiringpattern is laminated and embedded in the insulator layer 101.Thereafter, the aluminum carrier is removed by etching with hydrochloricacid or the like. The use of a carrier-borne metal foil makes itpossible to configure the wiring layer so that the land 103 does notprotrude from the surface of the insulator layer 101 by selecting thethickness of the metal foil. In other words, by using the metal foilwith a thickness substantially equal to that of the resin layer on thesurface, the wiring layer can be configured so that the lands do notprotrude from the surface of the insulator layer, while by using athicker metal foil than the resin layer on the surface, the lands aremade to protrude.

[0067] A method of transferring a wiring pattern formed on a supportingsubstrate to the insulator base material to form a circuit board, asdescribed above, is referred to as a transferring technique. A carrieron which a wiring pattern is formed is referred to as a transferformative base. The carrier-borne metal foil used in the transferringtechnique is not limited to the above-described combination of thealuminum carrier and the metal foil, and for instance, a metal foil maybe formed on a resin substrate (carrier). The carrier is removable bysandblast. Alternatively, a carrier-borne metal foil may be formed bycausing the carrier and the wiring pattern to temporarily adhere witheach other by using an adhesive sheet. For instance, by using “LIBAALFA”(trade name, produced by Nitto Denko Corporation), which is an adhesivesheet that easily loses the adhesive strength due to heat, the carrieris removed readily by applying heat at approximately 150° C. after acircuit board is formed.

[0068] Furthermore, as another technique for forming a wiring layer, atechnique for forming a wiring pattern by partial etching of a normalmetal foil (partial etching technique) is applicable. The followingdescription will depict the same by taking a case where a copper foil isused as the metal foil.

[0069] First of all, a wiring pattern is formed by etching the copperfoil to approximately a half thickness from one side thereof, with anaqueous solution of iron chloride, an aqueous solution of ammoniumpersulfate, or the like. Then, after the wiring pattern is laminated andembedded in the insulator layer 101, the remaining copper foil ispatterned by etching with an aqueous solution of iron chloride, anaqueous solution of ammonium persulfate, or the like. By using thepartial etching technique; the wiring layer is configured so that thelands 103 protrude from the surface of the insulator layer 101.Therefore, the partial etching technique is suitable for forming amulti-layer circuit board.

[0070] The wiring layer of the present invention may be formed by a wetprocess such as plating, or a vacuum process such as sputtering vapordeposition.

[0071] First Embodiment

[0072]FIG. 2 is a cross-sectional view schematically illustrating acircuit board (double-sided circuit board) of a first embodiment of thepresent invention. As shown in FIG. 2, the circuit board of the presentembodiment is composed of an insulator layer 201 made of an organicresin and a fabric of an inorganic fiber (a material with a smallerthermal expansion coefficient than that of the organic resin),inner-via-hole connectors 202 formed in the insulator layer 201, andlands 203 embedded in the insulator layer 201. Here, the insulator layer201 includes surface parts 205 in which the organic resin is a maincomponent (the percentage of the organic resin is high) and a core part206 in which the inorganic fiber fabric is a main component (thepercentage of the organic resin is low), and surfaces 204 of the lands203 in contact with the inner-via-hole connector 202 substantially arein the plane that includes interfaces between the surface parts 205 andthe core part 206. A thickness of the inner-via-hole connector 202 issubstantially equal to that of the core part 206.

[0073] The following description will depict the circuit substrateaccording to the present embodiment in more detail, by taking as anexample a case where the insulator layer 201 is made of a glass epoxybase material, the inner-via-hole connector 202 is made of a compositionof copper and an epoxy resin, and the wiring layer is made of a copperfoil.

[0074] First of all, as shown in FIG. 3A, a glass epoxy base material208 in a prepreg state (semi-hardened state) (hereinafter referred to as“glass epoxy prepreg”, having a core layer with a thickness of 100 μmand resin layers on the surfaces with a thickness of 10 μm each) isperforated so that through holes are provided at desired positions, andthe through holes are filled with a paste-like copper-epoxy resincomposition 209 by printing or another technique.

[0075] The through holes are formed by a normal circuit boardperforating technique. Examples of perforating techniques includemechanical perforating techniques utilizing drills or punchers, andlaser perforating techniques using carbon dioxide gas laser, excimerlaser, or YAG laser. To open tapered perforations as shown in FIG. 3A, acarbon dioxide gas laser among the above, having a wavelength of 9.4 μmor 10.6 μm, is used, and one to three shots of the same are applied.

[0076] Subsequently, the wiring layer is formed by the foregoing partialetching technique. First of all, wiring patterns are formed on copperfoils 210 by etching the same to approximately half of their thicknessfrom one side thereof each, with an aqueous solution of iron chloride,an aqueous solution of ammonium persulfate, or the like (FIG. 3B).

[0077] Next, the copper foils 210 are placed on-both sides of the glassepoxy prepreg 208 filled with the paste-like copper-epoxy resincomposition 209 so that wiring-pattern-formed surfaces of the copperfoils 201 face the glass epoxy prepreg 208, and heat and pressure isapplied thereto by hot pressing. The conditions for this process are aheating temperature of 180° C. to 250° C., a pressure of 30 kgf/cm² to200 kgf/cm², and a heating time of 0.5 hour to 2 hours.

[0078] In this process, the epoxy resin as thermosetting resin ishardened, and the glass epoxy prepreg 208 and the wiring pattern arebonded with each other. A glass epoxy base material, which is the glassepoxy prepreg 208 in a state in which the epoxy resin has been hardened,constitutes an insulator layer. Through this process, the copper foils210 are embedded in the insulator layer so that wiring-pattern-formedsurfaces of the copper foils 210 substantially are in the planes thatinclude the interfaces between the surface parts having a high contentof the epoxy resin and the core part (having a high content of the glassfabric). By so doing, electric conduction between the wiring layersthrough the inner-via-hole connectors 209 is provided (FIG. 2).

[0079] Subsequently, as shown in FIG. 3C, wiring patterns are formed onexternal surfaces of the copper foils 210, so that lands 211 are formed.Thus, a double-sided circuit board 212 is completed (FIG. 3D).

[0080] A multi-layer circuit board is fabricated through a processdescribed below.

[0081] As shown in FIGS. 3D to 3E, glass epoxy prepregs 213 filled withthe paste-like copper-epoxy resin composition are laminated on bothsides of the aforementioned double-sided circuit board 212, and furtheron the external surfaces of the same, copper foils 214 on which wiringpatterns are formed by partial etching are laminated. After heat andpressure is applied by hot pressing or the like, the copper foils 214 onthe external surfaces are patterned, whereby the multi-layer circuitboard is completed.

[0082] It should be noted that the insulator layer of the presentembodiment is not limited to that made of a glass epoxy base material,but may be made of any composite material composed of an organic resinand an inorganic fiber fabric. The composite material is configured in alamination of the surface parts containing the organic resin as the maincomponent and the core part having the fabric as the main component, inwhich the surface part, the core part, and the surface part arelaminated in the stated order.

[0083] A fabric made of an inorganic fiber such as glass fiber may beused as the foregoing fabric.

[0084] In the case where a thermoplastic resin is used as the organicresin, the thermoplastic resin is softened by hot pressing and is moldedinto a desired shape and state having inner-via-hole connectors,insulator layer, and a wiring pattern, whereby a circuit board of thepresent embodiment can be obtained.

[0085] Second Embodiment

[0086]FIG. 4 is a cross-sectional view of a circuit board (double-sidedcircuit board) according to a second embodiment of the presentinvention. As shown in FIG. 4, a circuit board of the present embodimentis composed of an insulator layer 301 made of an organic resin and anonwoven fabric of an inorganic fiber (a material with a smaller thermalexpansion coefficient than that of the organic resin), inner-via-holeconnectors 302 formed in the insulator layer 301, and lands 303 embeddedin the insulator layer 301. Here, the insulator layer 301 includessurface parts 305 in which the organic resin is a main component (thepercentage of the organic resin is high) and a core part 306 in whichthe inorganic fiber fabric is a main component (the percentage of theorganic resin is low), and surfaces 304 of the lands 303 in contact withthe inner-via-hole connector 302 substantially are in the planes thatinclude the interfaces between the surface parts 305 and the core part306. The thickness of the inner-via-hole connector 302 is substantiallyequal to that of the core part 306.

[0087] The circuit board of the present embodiment is configured in thesame manner as that of the first embodiment, except that the insulatorlayer is made of a composite material composed of an organic resin andan inorganic fiber nonwoven fabric, and that the composite material isconfigured in a lamination of the surface parts containing the organicresin as the main component and the core part having the nonwoven fabricas the main component, in which the surface part, the core part, and thesurface part are laminated in the stated order.

[0088] A nonwoven fabric made of an inorganic fiber such as glass fibermay be adapted as the foregoing nonwoven fabric.

[0089] Third Embodiment

[0090]FIG. 5 is a cross-sectional view of a circuit board (double-sidedcircuit board) according to a third embodiment of the present invention.As shown in FIG. 5, a circuit board of the present embodiment iscomposed of an insulator layer 401 made of an organic resin and anorganic film (a material with a smaller thermal expansion coefficientthan that of the organic resin), inner-via-hole connectors 402 formed inthe insulator layer 401, and lands 403 embedded in the insulator layer401. Here, the insulator layer 401 includes surface parts 405 in whichthe organic resin is a main component (the percentage of the organicresin is high) and a core part 406 in which the organic film is a maincomponent (the percentage of the organic resin is low), and surfaces 404of the lands 403 in contact with the inner-via-hole connector 402substantially are in the planes that include the interfaces between thesurface parts 405 and the core part 406. The thickness of theinner-via-hole connector 402 is substantially equal to that of the corepart 406.

[0091] The circuit board of the present embodiment is configured in thesame manner as that of the first embodiment, except that the insulatorlayer is made of a composite material composed of an organic resin andan organic film, and that the composite material is configured in alamination of the surface parts containing the organic resin as the maincomponent and the core part having the organic film as the maincomponent, in which the surface part, the core part, and the surfacepart are laminated in the stated order.

[0092] To form an organic film used as a core layer thereof, an organicsheet or film made of synthetic resins such as polyimide,benzocyclobutene (BCB), polytetrafluoroethylene (PTFE), aramid,polyparaphenylene benzobisoxazole (PBO), all aromatic polyesters, or thelike, or a film or sheet made of an inorganic insulating material suchas ceramic may be used. To form resin layers provided on both the sides,an epoxy resin or a polyimide resin may be used.

[0093] Fourth Embodiment

[0094]FIG. 6 is a cross-sectional view of a circuit board (double-sidedcircuit board) according to a fourth embodiment of the presentinvention. As shown in FIG. 6, a circuit board of the present embodimentis composed of an insulator layer 501 made of an organic resin and aninorganic filler (a material with a smaller thermal expansioncoefficient than that of the organic resin), inner-via-hole connectors502 formed in the insulator layer 501, and lands 503 embedded in theinsulator layer 501. Here, the insulator layer 501 includes surfaceparts 505 in which the organic resin is a main component (the percentageof the organic resin is high) and a core part 506 in which the inorganicfiller is a main component (the percentage of the organic resin is low),and surfaces 504 of the lands 503 in contact with the inner-via-holeconnector 502 substantially are in the planes that include theinterfaces between the surface parts 505 and the core part 506. Thethickness of the inner-via-hole connector 502 is substantially equal tothat of the core part 506.

[0095] The circuit board of the present embodiment is configured in thesame manner as that of the first embodiment, except that the insulatorlayer is made of a composite material composed of an organic resin andan inorganic filler.

[0096] Useful as the inorganic filler are aluminum hydroxide, aluminumoxide (alumina), silicon dioxide (silica), silicon nitride, and thelike.

[0097] Fifth Embodiment

[0098]FIG. 7 is a cross-sectional view of a circuit board (double-sidedcircuit board) according to a fifth embodiment of the present invention.As shown in FIG. 7, a circuit board of the present embodiment iscomposed of an insulator layer 601 made of an organic resin and a porousmaterial (a material with a smaller thermal expansion coefficient thanthat of the organic resin), inner-via-hole connectors 602 formed in theinsulator layer 601, and lands 603 embedded in the insulator layer 601.Here, the insulator layer 601 includes surface parts 605 in which theorganic resin is a main component (the percentage of the organic resinis high) and a core part 606 in which the inorganic filler is a maincomponent (the percentage of the organic resin is low), and surfaces 604of the lands 603 in contact with the inner-via-hole connector 602substantially are in the planes that include the interfaces between thesurface parts 605 and the core part 606. The thickness of theinner-via-hole connector 602 is substantially equal to that of the corepart 606.

[0099] The circuit board of the present embodiment is configured in thesame manner as that of the first embodiment, except that the insulatorlayer is made of a composite material composed of an organic resin and aporous material, and that the composite material is configured in alamination of the surface parts containing the organic resin as the maincomponent and the core part having the porous material as the maincomponent, in which the surface part, the core part, and the surfacepart are laminated in the stated order.

[0100] Useful as the core part containing a porous material as the maincomponent is, for instance, a sheet obtained by impregnating a porousmaterial such as a fluororesin with an organic resin, to which in somecases an inorganic filler is added.

[0101] Evaluation Tests

[0102] Connection reliability and bond strength of the wiring patternsof the circuit substrates according to the first through fifthembodiments were evaluated. The evaluation of the connection reliabilitywas carried out by an accelerated test and a pressure cooker test inwhich the samples were left in a saturated aqueous vapor at 121° C. and0.2 MPa. The evaluation of the adhesive strength was carried out by a90-degree peeling test to a 1-cm wiring pattern. As a material forforming the inner-via-hole connectors, a composition of a copper powderand an epoxy resin was used. The copper powder was composed of copperparticles with a mean particle diameter of 5 μm (85 percent by mass(mass %)), and the epoxy resin composition (15 mass %) was a mixture ofdimer acid diglycidyl ether epoxy resin and bisphenol F epoxy resin towhich 15 parts of amine adduct powder hardener (AMICURE MY-24 producedby Ajinomoto Co., Inc.) was added. The foregoing composition had athermal expansion coefficient of 20 ppm.

[0103] In the first embodiment, a glass epoxy base material that wasformed by impregnating a glass fabric (thickness: 90 μm, thermalexpansion coefficient: 5 ppm) with an epoxy resin (thermal expansioncoefficient: 60 ppm) so that epoxy resin layers of the surface parts 205had a thickness of 10 μm each was used as the insulator layer 201. Anelectrolytic copper foil with a thickness of 18 μm was used as thewiring layer. Each inner-via-hole connector 202 had an upper diameter of200 μm and a lower diameter of 180 μm (Example 1).

[0104] Examples 2 to 4 were identical to Example 1 except that the glassfabrics had thicknesses of 50 μm (Example 2), 15 μm (Example3), and 200μm (Example 4), respectively.

[0105] In the third embodiment, as to the insulator layer 401, apolyimide film (thickness: 12.5 μm, thermal expansion coefficient: 80ppm) was used as the core part 406, and a polyimide-based adhesive(thickness: 5 μm, thermal expansion coefficient: 190 ppm) was used asthe surface part 405. An electrolytic copper foil with a thickness of 9μm was used as the wiring layer. Each inner-via-hole connector 402 hadan upper diameter of 50 μm and a lower diameter of 45 μm (Example 5).

[0106] Examples 6 to 8 were identical to Example 5 except that thepolyimide films had thicknesses of 3 μm (Example 6), 9 μm (Example 7),and 25 μm (Example 8), respectively.

[0107] In the fourth embodiment, an alumina epoxy composite material(thickness: 50 μm, thermal expansion coefficient: 18 ppm) obtained bydispersing an alumina filler (70 mass %) with a particle diameter of 10μm in an epoxy resin was used as the core part 506, and an epoxy resin(thickness: 5 μm, thermal expansion coefficient: 60 ppm) was used as thesurface part 505. An electrolytic copper foil with a thickness of 9 μmwas used as the wiring layer. Each inner-via-hole connector 502 had anupper diameter of 150 μm and a lower diameter of 140 μm (Example 9).

[0108] Examples 10 to 12 were identical to Example 9 except that thealumina epoxy composite material had thicknesses of 20 μm (Example 10),70 μm (Example 11), and 100 μm (Example 12), respectively.

[0109] In the fifth embodiment, as to the insulator layer 601, acomposite material (thickness: 35 μm, thermal expansion coefficient: 26ppm) obtained by impregnating a porous sheet made of a fluororesin(polytetrafluoroethylene) with a silica-dispersed epoxy resin was usedas the core part 606, and an epoxy resin (thickness: 5 μm, thermalexpansion coefficient: 60 ppm) was used as the surface part 605. Anelectrolytic copper foil with a thickness of 9 μm was used as the wiringlayer. Each inner-via-hole connector 602 had an upper diameter of 50 μmand a lower diameter of 45 μm (Example 13).

[0110] Examples 14 to 16 were identical to Example 13 except that thecomposite materials made of the porous sheet impregnated with asilica-dispersed epoxy resin had thicknesses of 10 μm (Example 14), 20μm (Example 15), and 50 μm (Example 16), respectively.

[0111] In the first embodiment, a filler-containing glass epoxysubstrate that was formed by impregnating a glass fabric (thickness: 90μm, thermal expansion coefficient: 5 ppm) with a silica-filler (particlediameter: 3 μm)-dispersed epoxy resin so that epoxy resin layers of thesurface parts 205 had a thickness of 5 μm each was used as the insulatorlayer 201. The content of the silica filler in the surface parts 205 wasset to 5 percent by volume (vol %) (Example 17), 20 vol % (Example 18),50 vol % (Example 19), and 70 vol % (Example 20).

[0112] For comparison with Examples 1 to 20, circuit boards configuredas shown in FIG. 8 were produced using the same materials as those ofthe circuit boards in the foregoing embodiments and were subjected tothe tests (Comparative Examples 1 to 20).

[0113] In the circuit substrate shown in FIG. 8, a land 703 embedded inan insulator layer 701 had a surface in contact with an inner-via-holeconnector 702 inside a surface layer 705, and the inner-via-holeconnector 702 had a thickness greater than that of a core part 706.

[0114] Furthermore, a circuit board that was identical to Examples 17 to20 except that the content of the silica filler was 85 vol % wasprepared as a comparative example to Examples 17 to 20 (ComparativeExample 21).

[0115] Table 1 below shows the outcomes of the evaluation test. TABLE 1BOND CONNECTION NO. STRENGTH RELIABILITY EX. 1 ∘ ∘ EX. 2 ∘ ∘ EX. 3 ∘ ∘EX. 4 ∘ ∘ EX. 5 ∘ ∘ EX. 6 ∘ ∘ EX. 7 ∘ ∘ EX. 8 ∘ ∘ EX. 9 ∘ ∘ EX. 10 ∘ ∘EX. 11 ∘ ∘ EX. 12 ∘ ∘ EX. 13 ∘ ∘ EX. 14 ∘ ∘ EX. 15 ∘ ∘ EX. 16 ∘ ∘ EX. 17∘ ∘ EX. 18 ∘ ∘ EX. 19 ∘ ∘ EX. 20 ∘ ∘ COM. EX. 1 x ∘ COM. EX. 2 x ∘ COM.EX. 3 x ∘ COM. EX. 4 x ∘ COM. EX. 5 x ∘ COM. EX. 6 x ∘ COM. EX. 7 x ∘COM. EX. 8 x ∘ COM. EX. 9 x ∘ COM. EX. 10 x ∘ COM. EX. 11 x ∘ COM. EX.12 x ∘ COM. EX. 13 x ∘ COM. EX. 14 x ∘ COM. EX. 15 x ∘ COM. EX. 16 x ∘COM. EX. 17 x ∘ COM. EX. 18 x ∘ COM. EX. 19 x ∘ COM. EX. 20 x ∘ COM. EX.21 ∘ x

[0116] As to evaluation criteria, the connection reliability wasevaluated as x in the case where a wiring circuit including aninner-via-hole connector was broken within 168 hours, and it wasevaluated as O in the case where a resistance did not vary more than10%. The bond strength was evaluated as O in the case of not less than15 N, and it was evaluated as x in the case of less than 15 N.

[0117] As seen in the above Table 1, according to the first throughfifth embodiments of the present invention, it is possible to obtain acircuit board that excels in connection reliability and wiring patternbond strength.

[0118] It should be noted that in the case where another insulator layermaterial in the foregoing embodiments is used, it is also possible toobtain a circuit board that excels in connection reliability and wiringpattern adhesive strength, as in the cases of Examples 1 to 20.

[0119] Sixth Embodiment

[0120]FIGS. 9A to 9E are cross-sectional views illustrating steps of acircuit board producing process according to the present embodiment,respectively, which are shown in an order in which the steps are carriedout.

[0121] First of all, as shown in FIG. 9A, a metal film 16 (Ni) is formedon a thick copper foil 13 (35 μm) by plating, vapor deposition,sputtering, or another technique, with a resist 14 formed thereon.Subsequently, the metal film and the thick copper foil were etched to apredetermined thickness, and the resist 14 was removed, so that ametal-film-laminated thick copper foil 17 was obtained as shown in FIG.9B. A material made of one selected from Au, Ag, Cr, Pb, Zn, Ni, and Snmay be used for forming the metal film.

[0122] Next, as shown in FIG. 9C, the metal-film-laminated thick copperfoils 17 were provided on both sides of a filled prepreg base material10. Then, as shown in FIG. 9D, a predetermined pressure was appliedthereto at a predetermined curing temperature of the prepreg basematerial by a press machine, for complete adhesion, and the copper foilwas then patterned. Consequently, a double-sided board 18 shown in FIG.9E was obtained.

[0123] As in the third embodiment, it is possible to produce amulti-layer board through a subsequent process, which however is omittedherein.

[0124] Furthermore, it is effective to use a thick copper foil whoserecessed portions formed by etching as shown in FIG. 9B have beensubjected to a blackening treatment, a chromate treatment, or aroughening treatment.

[0125] As described above, according to the present embodiment, acircuit board in which a conductive paste provides electric connectionbetween layers is obtained by perforating a prepreg base material,filling a conductive paste, providing copper foils on both sides, andcarrying out hot pressing thereon, so that the copper foils provided onboth surfaces of the prepreg base material are electrically connected.In the case where a glass epoxy base material is used, there has been adrawback in that stable connection between layers with a minimum ofcompressibility cannot be secured. In the foregoing circuit board,however, more stable connection between layers can be achieved byproviding protrusions on a thick copper foil by partial etching, andcompressing the conductive paste portions with the protrusions.

[0126] In the sequential technique in which multiple layers aresequentially provided on the innermost core layer, protrusions areprovided on both sides of the innermost core layer so that in theadjacent layer a conductive paste can be compressed at the protrusions,and this allows ordinary electrolytic copper foils (for instance, GT-GLD18 μm produced by Furukawa Circuit Wheel) to be adapted as the layerssubsequently provided.

[0127] Therefore, a base material with low all-layer compressibility(for instance, glass epoxy base material FR-4 available from HitachiChemical Co., Ltd.) may be used. In other words, it is possible torender a base material configuration suitable for required performance,for instance, high bandwidth, or high reliability.

[0128] Besides, upon partial etching, by applying a blackeningtreatment, a chromate treatment, or the like to portions other than theprotruded portions, the metal filler contained in the conductive pasteand the copper foil are made to adhere to each other readily. Thus, theadhesive strength of the copper foil is increased at the portionsprocessed by the foregoing treatment.

[0129] Furthermore, upon partial etching, in the case where theroughness of the surfaces of the copper foil except the protrudedportions is increased, the adhesive strength is increased as in theforegoing case. On the other hand, in the case where the roughness isdecreased, this is advantageous for finer patterning. This allowsproduct planning to match customers' demands freely.

[0130] A circuit board in which lands are produced by partial etching ofa metal foil is shown as the present embodiment. A patterned wiring thatwill constitute lands, however, may be formed by full etching on asacrificial board, and may be used for forming a circuit board of thepresent invention.

[0131] Seventh Embodiment

[0132]FIGS. 10A to 10E are cross-sectional views schematicallyillustrating a circuit board (double-sided circuit board) according to aseventh embodiment of the present invention. The circuit board of thepresent embodiment is composed of an insulator layer 201 made of anorganic resin and a fabric of an inorganic fiber (a material with asmaller thermal expansion coefficient than that of the organic resin),inner-via-hole connectors 202 formed in the insulator layer 201, andlands 203 embedded in the insulator layer 201. Here, the insulator layer201 includes surface parts 205 in which the organic resin is a maincomponent (the percentage of the organic resin is high) and a core part206 in which the inorganic fiber fabric is a main component (thepercentage of the organic resin is low), and surfaces 204 of the lands203 in contact with the inner-via-hole connector 202 substantially arein the planes that include the interfaces between the surface parts 205and the core part 206. The thickness of the inner-via-hole connector 202is substantially equal to that of the core part 206.

[0133] The following description will depict the circuit substrateaccording to the present embodiment in more detail, by taking as anexample a case where the insulator layer 201 is made of a glass epoxybase material, the inner-via-hole connector 202 is made of a compositionof copper and an epoxy resin, and the wiring layer is made of a copperfoil.

[0134] First of all, as shown in FIG. 10A, a glass epoxy prepreg 208 ina prepreg state (semi-hardened state) (the thickness of a core layer:100 μm, each thickness of resin layers on the surfaces: 10 μm) isperforated so that through holes are provided at desired positions, byapplying, from above, one to three shots of a carbon dioxide gas laserhaving a wavelength of 9.4 μm or 10.6 μm. The through holes are filledwith a paste-like copper-epoxy resin composition 209, from a side of thewider openings of the through holes, by printing or another technique.

[0135] Next, a 50 μm-thick aluminum plate as a carrier 801 on whosesurface an 18 μm-thick copper foil 802 is laminated is used as atransfer formative base 803. This allows lands to be protruded from theglass epoxy prepreg base material 208, thereby allowing the protrudedportions to be laminated subsequently so as to be embedded in theinsulator layer. These transfer formative bases 803 are provided on bothsides of the glass epoxy prepreg base material 208, as shown in FIG.10B.

[0136] Next, hot pressing is applied for heating and pressurization. Asto the conditions for the same, the heating temperature, the pressure,and the heating time are 180° C. to 250° C., 30 kgf/cm² to 200 kgf/cm²,and 0.5 hour to 2 hours, respectively.

[0137] This process allows the epoxy resin as the thermosetting resin tobe hardened, and the glass epoxy prepreg 208 and the wiring pattern 802to adhere to each other. The glass epoxy base material, which is theglass epoxy prepreg 208 in which the epoxy resin has been hardened,constitutes the insulator layer. This process also allows the copperfoil 802 to be embedded in the insulator layer so that a surface of thecopper foil 802 on which the wiring pattern is provided substantially isin the plane that includes the interface between the surface part of theinsulator layer in which the percentage of the epoxy resin is high andthe core part of the insulator layer in which the percentage of theglass fabric is high (the percentage of the epoxy resin is high). Thus,electric conduction between the wiring layers is provided by theinner-via-hole connectors 209 (FIG. 10C). Subsequently, the entirety ofthe aluminum carrier 801 is removed by etching with hydrochloric acid.Through the process described so far, a double-sided circuit board 212(FIG. 10D) is completed.

[0138] A multi-layer circuit board is produced as described below.

[0139] As shown in FIGS. 10D to 10E, the glass epoxy prepregs 213 filledwith a paste-like copper-epoxy resin composition are placed on bothsides of the above-described double-sided circuit board 212, and then,the transfer materials 803 are placed on external sides of the same asdescribed above. After heat and pressure is applied by hot pressing orthe like, the aluminum carrier 801 is removed.

[0140] The invention may be embodied in other forms without departingfrom the spirit or essential characteristics thereof The embodimentsdisclosed in this application are to be considered in all respects asillustrative and not limiting. The scope of the invention is indicatedby the appended claims rather than by the foregoing description, and allchanges which come within the meaning and range of equivalency of theclaims are intended to be embraced therein.

What is claimed is:
 1. A circuit board, comprising: not less than twowiring layers; an insulator layer for electric insulation between thewiring layers; and an inner-via-hole conductive member provided in theinsulator layer in a thickness direction of the insulator layer forelectric connection between the wiring layers, wherein: the insulatorlayer is made of a composite material containing an organic resin and amaterial having a smaller thermal expansion coefficient than that of theorganic resin, and includes a surface part, a core part, and a surfacepart laminated in the stated order, the surface part having a highcontent of the organic resin, the core part having a low content of theorganic resin; the wiring layers have a land portion that is connectedwith the inner-via-hole conductive member, the land portion beingembedded so as to be substantially in contact with the core part; andthe inner-via-hole conductive member has a thickness substantially equalto a thickness of the core part.
 2. The circuit board according to claim1, wherein the land portion is embedded to a depth in a range of 2 μm to50 μm.
 3. The circuit board according to claim 1, wherein the landportion protrudes from the surface part.
 4. The circuit board accordingto claim 3, wherein a height of protrusion of the land portion is in arange of 2 μm to 50 μm.
 5. The circuit board according to claim 1,wherein the core part includes at least one selected from a fabric of aninorganic fiber, a nonwoven fabric of an inorganic fiber, and asynthetic resin film.
 6. The circuit board according to claim 5, whereinthe core part includes the inorganic fiber, and the inorganic fiber isglass.
 7. The circuit board according to claim 5, wherein the syntheticresin film is a film made of at least one selected from the groupconsisting of polyimide, benzocyclobutene (BCB), polytetrafluoroethylene(PTFE), aramid, polyparaphenylene benzobisoxazole (PBO), and allaromatic polyesters.
 8. The circuit board according to claim 5, whereinthe core part further contains an inorganic filler.
 9. The circuit boardaccording to claim 8, wherein the inorganic filler is at least onefiller selected from the group consisting of aluminum hydroxide,aluminum oxide (alumina), silicon dioxide (silica), and silicon nitride.10. The circuit board according to claim 5, wherein the core partincludes the synthetic resin fiber, and the synthetic resin film is madeof a porous material.
 11. The circuit board according to claim 10,wherein the porous material is impregnated with a composition of aninorganic filler and an organic resin.
 12. The circuit board accordingto claim 11, wherein the porous material is made of a fluororesin, andthe inorganic filler is at least one filler selected from the groupconsisting of aluminum hydroxide, aluminum oxide (alumina), silicondioxide (silica), and silicon nitride.
 13. The circuit board accordingto claim 1, wherein the organic resin is at least one resin selectedfrom the group consisting of epoxy resins, polyimide resins, cyanateester resins, phenol resol resins, all aromatic polyester resins,polyphenylene ether (PPE) resins, bismaleimide triazine resins, andfluororesins.
 14. The circuit board according to claim 13, wherein theorganic resin further is impregnated with at least one filler selectedfrom the group consisting of aluminum hydroxide, aluminum oxide(alumina), silicon dioxide (silica), and silicon nitride.
 15. Thecircuit board according to claim 1, wherein the inner-via-holeconductive member is made of a composition of a conductive filler and anorganic resin.
 16. The circuit board according to claim 15, wherein theconductive filler is made of at least one selected from the groupconsisting of gold, silver, copper, nickel, palladium, lead, tin,indium, and bismuth, alloys of these, and mixtures of these.
 17. Thecircuit board according to claim 15, wherein a through hole filled withthe inner-via-hole conductive member has a cross section in a taperedshape, and the inner-via-hole conductive member is put into the throughhole from a wider opening of the through hole.
 18. A circuit boardproducing method, the circuit board including not less than two wiringlayers, an insulator layer for electric insulation between the wiringlayers, and an inner-via-hole conductive member provided in theinsulator layer in a thickness direction of the insulator layer forelectric connection between the wiring layers, the circuit boardproducing method comprising the steps of: making an insulator layer of acomposite material containing an organic resin and a material having asmaller thermal expansion coefficient than that of the organic resin sothat the insulator layer includes a surface part, a core part, and asurface part laminated in the stated order, the surface part having ahigh content of the organic resin, the core part having a low content ofthe organic resin; opening an inner via hole in the insulator layer in athickness direction of the insulator layer, and filling the inner viahole with a conductive material; providing metal foils on both sides ofthe insulator layer, each metal foil having a protruded portion at apredetermined position so that the position coincides with a position ofthe inner via hole filled with the conductive material; applying heatand pressure to external sides of the metal foils by hot pressing sothat the protruded portions of the metal foils come substantially incontact with the core part of the insulator layer, to cause the innervia hole filled with the conductive material to form an inner-via-holeconductive member with a thickness substantially equal to a thickness ofthe core part; and etching the metal foils so as to leave the protrudedportion as the land portion.
 19. The circuit board producing methodaccording to claim 18, wherein the land portion of the metal foil isformed by pattern formation by etching.
 20. The circuit board producingmethod according to claim 18, wherein the metal foils are copper foils,and a rust prevention treatment selected from a blackening treatment anda chromate treatment is applied to recessed portions of the metal foilsthat have been recessed by etching to a predetermined thickness forforming a predetermined pattern.
 21. The circuit board producing methodaccording to claim 18, wherein a roughening treatment is applied torecessed portions of the metal foils that have been recessed by etchingto a predetermined thickness for forming a predetermined pattern. 22.The circuit board producing method according to claim 18, wherein theinner via hole has a cross section in a tapered shape, and theconductive material is filled into the inner via hole from a wideropening thereof.
 23. The circuit board producing method according toclaim 18, wherein the conductive material is a conductive paste.
 24. Acircuit board producing method, the circuit board including not lessthan two wiring layers, an insulator layer for electric insulationbetween the wiring layers, and an inner-via-hole conductive memberprovided in the insulator layer in a thickness direction of theinsulator layer for electric connection between the wiring layers, thecircuit board producing method comprising the steps of: making aninsulator layer of a composite material containing an organic resin anda material having a smaller thermal expansion coefficient than that ofthe organic resin so that the insulator layer includes a surface part, acore part, and a surface part laminated in the stated order, the surfacepart having a high content of the organic resin, the core part having alow content of the organic resin; opening an inner via hole in theinsulator layer in a thickness direction of the insulator layer, andfilling the inner via hole with a conductive material; providingtransfer bases on both sides of the insulator layer, each of thetransfer bases having a metal foil patterned in a predetermined patternso as to coincide with a position of the inner via hole filled with theconductive material; and applying heat and pressure to external sides ofthe transfer bases by hot pressing so that the metal foils comesubstantially in contact with the core part of the insulator layer, tocause the inner via hole filled with the conductive material to form aninner-via-hole conductive member with a thickness substantially equal toa thickness of the core part.
 25. The circuit board producing methodaccording to claim 24, wherein the inner via hole has a cross section ina tapered shape, and the conductive material is filled therein from awider opening thereof.
 26. The circuit board producing method accordingto claim 24, wherein the conductive material is a conductive paste.